The Our World in Data article How does the land use of different electricity sources compare? by Hannah Ritchie (6/16/2022) looks to answer this question. Here is what they consider:
To capture the whole picture we compare these footprints based on life-cycle assessments. These cover the land use of the plant itself while in operation; the land used to mine the materials for its construction; mining for energy fuels, either used directly (i.e. the coal, oil, gas, or uranium used in supply chains) or indirectly (the energy inputs used to produce the materials); connections to the electricity grid; and land use to manage any waste that is produced.
The answer: Nuclear power.
At the bottom of the article there are links to other energy posts some of which have data.